https://scholars.lib.ntu.edu.tw/handle/123456789/79811
Title: | Fabrication of the Planar Angular Rotator Using the CMOS Process | Authors: | Dai, Ching-Liang Chang, Chien-Liu Chen, Hung-Lin PEI-ZEN CHANG |
Issue Date: | 2002 | Start page/Pages: | 247-251 | Source: | Journal of Micromechanics and Microengineering | URI: | http://ntur.lib.ntu.edu.tw//handle/246246/106971 | DOI: | 10.1088/0960-1317/12/3/308 |
Appears in Collections: | 應用力學研究所 |
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