https://scholars.lib.ntu.edu.tw/handle/123456789/79816
Title: | Novel Method for in situ Monitoring of Thickness of Quartz during Wet Etching | Authors: | Lee, Chi-Yuan Chang, Pei-Zen Chen, Yung-Yu Dai, Ching-Liang Chen, Ping-Hei PING-HEI CHEN PEI-ZEN CHANG |
Issue Date: | 2005 | Journal Volume: | 44 | Journal Issue: | 10 | Start page/Pages: | 7662-7666 | Source: | Japanese Journal of Applied Physics | URI: | http://ntur.lib.ntu.edu.tw//handle/246246/106993 | DOI: | 10.1143/JJAP.44.7662 |
Appears in Collections: | 應用力學研究所 |
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