https://scholars.lib.ntu.edu.tw/handle/123456789/79816
DC 欄位 | 值 | 語言 |
---|---|---|
dc.contributor.author | Lee, Chi-Yuan | en_US |
dc.contributor.author | Chang, Pei-Zen | en_US |
dc.contributor.author | Chen, Yung-Yu | en_US |
dc.contributor.author | Dai, Ching-Liang | en_US |
dc.contributor.author | Chen, Ping-Hei | en_US |
dc.contributor.author | PING-HEI CHEN | en_US |
dc.contributor.author | PEI-ZEN CHANG | en_US |
dc.creator | Lee, Chi-Yuan; Chang, Pei-Zen; Chen, Yung-Yu; Dai, Ching-Liang; Chen, Ping-Hei; Lee, Shuo-Jen | - |
dc.date | 2005 | en |
dc.date.accessioned | 2009-01-21T08:03:01Z | - |
dc.date.accessioned | 2018-06-29T00:08:44Z | - |
dc.date.available | 2009-01-21T08:03:01Z | - |
dc.date.available | 2018-06-29T00:08:44Z | - |
dc.date.issued | 2005 | - |
dc.identifier.uri | http://ntur.lib.ntu.edu.tw//handle/246246/106993 | - |
dc.format | application/pdf | en |
dc.format.extent | 151221 bytes | - |
dc.format.mimetype | application/pdf | - |
dc.language | en | en |
dc.language.iso | en_US | - |
dc.relation | Japanese Journal of Applied Physics 44 (10): 7662-7666 | en |
dc.relation.ispartof | Japanese Journal of Applied Physics | en_US |
dc.title | Novel Method for in situ Monitoring of Thickness of Quartz during Wet Etching | en |
dc.identifier.doi | 10.1143/JJAP.44.7662 | - |
dc.identifier.scopus | 2-s2.0-31544443552 | - |
dc.identifier.isi | WOS:000232739300094 | - |
dc.relation.pages | 7662-7666 | - |
dc.relation.journalvolume | 44 | - |
dc.relation.journalissue | 10 | - |
dc.identifier.uri.fulltext | http://ntur.lib.ntu.edu.tw/bitstream/246246/106993/1/15.pdf | - |
item.languageiso639-1 | en_US | - |
item.grantfulltext | open | - |
item.fulltext | with fulltext | - |
crisitem.author.dept | Applied Mechanics | - |
crisitem.author.dept | Mechanical Engineering | - |
crisitem.author.dept | Applied Mechanics | - |
crisitem.author.orcid | 0000-0002-4054-6791 | - |
crisitem.author.orcid | 0000-0002-8073-9344 | - |
crisitem.author.orcid | 0000-0002-4054-6791 | - |
crisitem.author.parentorg | College of Engineering | - |
crisitem.author.parentorg | College of Engineering | - |
crisitem.author.parentorg | College of Engineering | - |
顯示於: | 應用力學研究所 |
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