DC 欄位 | 值 | 語言 |
dc.contributor | 國立臺灣大學應用力學研究所 | zh_TW |
dc.contributor.author | 張培仁 | zh_TW |
dc.creator | 張培仁 | - |
dc.date | 2004-07-31 | - |
dc.date.accessioned | 2006-07-26T02:40:18Z | - |
dc.date.accessioned | 2018-06-29T00:17:43Z | - |
dc.date.available | 2006-07-26T02:40:18Z | - |
dc.date.available | 2018-06-29T00:17:43Z | - |
dc.date.issued | 2004-07-31 | - |
dc.identifier | 922212E002092 | zh_TW |
dc.identifier.uri | http://ntur.lib.ntu.edu.tw//handle/246246/21715 | - |
dc.description.abstract | 本研究利用CMOS-MEMS 技術研製一微
型鏡面陣列(micromirror array)。亦即,以積體
電路晶圓代工廠所提供之標準CMOS 0.35μm
製程,同時配合微機電(MEMS)後製程技術來
製作一數位式微型光連結裝置(digital
multi-direction optical interconnect device)。主
要目的乃期望能針對傳統大型光網路連結或
是空間光內連結裝置的尺度和效能等提出一
個切實可行的先期研發方案,此外基於光學微
機電裝置之低插入損失(insertion loss)、和切換
損失,此類的微型裝置亦十分切合現今所謂的
短距離無線通訊(雷射通訊)之需求,如機房主
機內部之I/O 切換或是通道擷取等等。 | zh_TW |
dc.description.abstract | This work describes the fabrication of a
micromachined micromirror by the
conventional 0.35μm CMOS process and a
simple maskless post-CMOS process. The
micromirror contains a rectangular mirror plate
and four pairs of serpentine supported beams, is
integrated with a 1×4 demultiplexer and a
four-stage charge pump circuits on a chip.
Maskless dry and wet etching processes are the
only requirement to suspend the structure. The
primary limitation in the fabrication of
microstructures has been overcome by the
development of a hybrid processing technique,
which combines both an anisotropic dry etch
and an isotropic wet etch step. A highly reliable
wet etching step with high selectivity between
aluminum and sacrificial oxide is also reported.
Experimental results reveal that the
micromirror has a tilting angle of around 5° at
operation voltage of 22.5 V and a dynamic
response less than 5 ms. The surface properties
of the CMOS micromirror, detailed process
flows, measurement set-up and the results are
also presented in this work. | en |
dc.format | application/pdf | zh_TW |
dc.format.extent | 159359 bytes | - |
dc.format.mimetype | application/pdf | - |
dc.language | zh-TW | zh_TW |
dc.language.iso | zh_TW | - |
dc.publisher | 臺北市:國立臺灣大學應用力學研究所 | zh_TW |
dc.rights | 國立臺灣大學應用力學研究所 | zh_TW |
dc.title | 積體電路相容微機電系統之研究-子計畫四:
積體電路相容微機電關鍵技術之研究(I) | zh_TW |
dc.type | report | en |
dc.identifier.uri.fulltext | http://ntur.lib.ntu.edu.tw/bitstream/246246/21715/1/922212E002092.pdf | - |
dc.coverage | 計畫年度:92;起迄日期:2003-08-01/2004-07-31 | zh_TW |
item.openairetype | report | - |
item.fulltext | with fulltext | - |
item.languageiso639-1 | zh_TW | - |
item.cerifentitytype | Publications | - |
item.openairecristype | http://purl.org/coar/resource_type/c_93fc | - |
item.grantfulltext | open | - |
crisitem.author.dept | Applied Mechanics | - |
crisitem.author.orcid | 0000-0002-4054-6791 | - |
crisitem.author.parentorg | College of Engineering | - |
顯示於: | 應用力學研究所
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