https://scholars.lib.ntu.edu.tw/handle/123456789/81053
Title: | Design and Performance Verification of a Microscope Based Interferometer for Miniature Specimen Metrology | Authors: | Lee, Chih-Kung Wu, Wen-Jong Wu, Giin-Yuan Li, Chia-Ling Chen, Zeng-De Chen, Jau-Yu |
Issue Date: | Aug-2005 | Journal Volume: | 44 | Journal Issue: | 8 | Start page/Pages: | - | Source: | Optical Engineering | URI: | http://ntur.lib.ntu.edu.tw//handle/246246/120154 |
Appears in Collections: | 應用力學研究所 |
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