https://scholars.lib.ntu.edu.tw/handle/123456789/81515
DC 欄位 | 值 | 語言 |
---|---|---|
dc.contributor.author | Chang, Pei-Zen | en |
dc.contributor.author | Yang, Lung-Jieh | en |
dc.creator | Chang, Pei-Zen; Yang, Lung-Jieh | - |
dc.date | 1998-09 | en |
dc.date.accessioned | 2010-09-03T11:19:39Z | - |
dc.date.accessioned | 2018-06-29T00:25:30Z | - |
dc.date.available | 2010-09-03T11:19:39Z | - |
dc.date.available | 2018-06-29T00:25:30Z | - |
dc.date.issued | 1998-09 | - |
dc.identifier.uri | http://ntur.lib.ntu.edu.tw//handle/246246/198053 | - |
dc.language.iso | en_US | - |
dc.relation | Journal of Micromechanics and Microengineering,8,182-187. | en |
dc.relation.ispartof | Journal of Micromechanics and Microengineering | - |
dc.title | A Method Using V-Groove to Monitor the Thickness of Silicon Membrane with Micrometer Resolution | en |
dc.relation.pages | 182-187 | - |
dc.relation.journalissue | 8 | - |
item.languageiso639-1 | en_US | - |
item.grantfulltext | none | - |
item.fulltext | no fulltext | - |
crisitem.author.dept | Applied Mechanics | - |
crisitem.author.orcid | 0000-0002-4054-6791 | - |
crisitem.author.parentorg | College of Engineering | - |
顯示於: | 應用力學研究所 |
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