https://scholars.lib.ntu.edu.tw/handle/123456789/82204
Title: | Design and Processing of Integrated Micro Accelerometer Using Standard CMOS Process | Authors: | Dai, Ching-Liang Chang, Pei-Zen Lu, Shui-Shomg |
Issue Date: | Jan-1997 | Journal Volume: | 20 | Journal Issue: | 1 | Start page/Pages: | 47-55 | Source: | Journal of the Chinese Institute of Engineers | URI: | http://ntur.lib.ntu.edu.tw//handle/246246/217985 |
Appears in Collections: | 應用力學研究所 |
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