https://scholars.lib.ntu.edu.tw/handle/123456789/83244
標題: | A Study of Silicon Nitride Nanotube Synthesis at Relative Low Temperature by Thermal-Heating Chemical-Vapor Deposition Method | 作者: | KANG, PEI-LEUN LIN, JIA-YU LEE, JINN-SHING TANG, TZU-PIAO HSU, CHUNG-KING LIN, FENG-HUEI |
關鍵字: | Si3N4 nanotube;Thermal-heating chemical-vapor deposition;Tetra-ethyl-ortho-silicate;Stainless-steel | 公開日期: | 2005 | 卷: | v.93 | 期: | n.1 | 起(迄)頁: | 10-15 | 來源出版物: | MATERIALS CHEMISTRY & PHYSICS | 摘要: | Thermal-heating chemical-vapor deposition has been used to synthesize Si3 N4 nanotubes by heating tetra-ethyl-ortho- silicate at 165°C to get vapor to flow in and providing nitrogen gas to the reaction chamber as the source of Si and N, respectively. A stainless-steel wire was coiled as entangled wire scaffold with a pore size of 1mm. The wire scaffold was placed in the middle part of the reaction chamber. Cr, Fe and Mo, contained in the stainless-steel, served as catalysts to provide in situ growth of Si3N4 nanotubes on the coil surface at a relative low reactant temperature (1000°C) through the vapor–liquid–solid growth mechanism. Most of the nanotubes are end-closed by a metallic particle. All the nanotubes were identified as α- Si3N4 in crystal structure. |
URI: | http://ntur.lib.ntu.edu.tw//handle/246246/105199 |
顯示於: | 醫學工程學研究所 |
在 IR 系統中的文件,除了特別指名其著作權條款之外,均受到著作權保護,並且保留所有的權利。