Issue Date | Title | Author(s) | Source | scopus | WOS | Fulltext/Archive link |
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1998 | A real-time equipment monitoring and fault detection system | Guo, R.S.; Chen, A.; Tseng, C.L.; Fong, I.K.; Yang, A.; Lee, C.L.; Wu, C.H.; Lin, S. ; Huang, S.J.; Lee, Y.C.; Chang, S.G.; RUEY-SHAN GUO ; ARGON CHEN | Semiconductor Manufacturing Technology Workshop | 8 | 0 |