公開日期 | 標題 | 作者 | 來源出版物 | scopus | WOS | 全文 |
1999 | Modeling and optimization of wafer-level spatial uniformity with the use of rational subgrouping | CHEE-WEE LIU ; Guo, Ruey-Shan; Chen, Argon; Liu, Cheewee; Lin, A.; Lan, M.; CHEE-WEE LIU | IEEE International Symposium on Semiconductor Manufacturing Conference | | | |
1999 | Modeling and optimization of wafer-level spatial uniformity with the use of rational subgrouping | Guo, Ruey-Shan ; Chen, Argon; Liu, Cheewee; Lin, A.; ARGON CHEN | 1999 IEEE International Symposium on Semiconductor Manufacturing Conference | 2 | 0 | |
- | Robust Configuration and Monitoring of Semiconductor Supply Chain | Chen, Argon; Chiang, David; Guo, Ruey-Shan | | | | |
2000 | Run-to-run control schemes for CMP process subject to deterministic drifts | Guo, Ruey-Shan ; Chen, Argon; ARGON CHEN | Semiconductor Manufacturing Technology Workshop | 18 | 0 | |
- | Task 879.1: Intelligent Demand Aggregation and Forecasting | Chen, Argon; Guo, Ruey-Shan; Chang, Shi-Chung | | | | |