公開日期 | 標題 | 作者 | 來源出版物 | scopus | WOS | 全文 |
---|---|---|---|---|---|---|
2018 | Atmospheric pressure plasma jet assisted synthesis of zeolite-based low-k thin films | K.-Y. Huang; H.-Y. Chi; P.-K. Kao; F.-H. Huang; Q.-M. Jian; I-C. Cheng; W. Lee; C.-C. Hsu; D.-Y. Kang; Kang D.-Y. ; Hsu C.-C. | ACS Applied Materials & Interfaces | 15 | 12 |