公開日期 | 標題 | 作者 | 來源出版物 | scopus | WOS | 全文 |
---|---|---|---|---|---|---|
2006 | A Novel Method for In-Situ Monitoring of the Thickness of a Silicon Wafer during Wet Etching | Lee, Chi-Yuan; Chang, Pei-Ze; Chen, Yung-Yu; Dai, Ching-Liang; Wang, X.-Y.; Chen, P.-H.; PING-HEI CHEN | Sensors and materials |