公開日期 | 標題 | 作者 | 來源出版物 | scopus | WOS | 全文 |
2004 | In Situ Monitoring of Silicon Membrane Thickness during Wet Etching using a Surface Acoustic Wave Sensor | Lee, Chi-Yuan; Cheng, Ying-Chou; Chen, Yung-Yu; Chang, Pei-Zen ; Wu, Tsung-Tsong ; Chen, Ping-Hei; Chen, Wen-Jong; PING-HEI CHEN ; PEI-ZEN CHANG ; TSUNG-TSONG WU | Japanese Journal of Applied Physics | 2 | 1 | |
2002 | Micro-System Displacement and Profile Measurement by an Integrated Photon Tunneling and Confocal Microscope | Chen, Wen-Jong; Huang, Long-Sun; CHIH-KUNG LEE ; Chu, Ta-Shun; Yeh, W.-F.; Lu, Shui-Shong; Cheng, Ying-Chou | The Chinese Journal of Mechanics | 2 | 1 | |
2004 | A Novel Method for Measuring the Thickness of Quartz using a Plate Wave Sensor | Lee, Chi-Yuan; Cheng, Ying-Chou; Chen, Yung-Yu; Chang, Pei-Zen ; Dai, Ching-Liang; Chen, Ping-Hei; Pao, Shih-Yung; Chen, Wen-Jong | Journal of the Chinese Society of Mechanical Engineers | | | |
2004 | 積體電路相容微機電技術及其在微光學鏡面裝置上的應用 | 鄭英周; Cheng, Ying-Chou | | | | |