公開日期 | 標題 | 作者 | 來源出版物 | scopus | WOS | 全文 |
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2008 | Flip-chip bonded MEMS capacitor applied on tuning superconductive resonator | WEN-PIN SHIH ; Chen, Yi-Jie; Kao, Cheng-Kai; Shih, Wen-Pin ; Chung, Sheng-Yuan; Chang, Pei-Zen | Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) | 2 | 0 |