Issue Date | Title | Author(s) | Source | scopus | WOS | Fulltext/Archive link |
---|---|---|---|---|---|---|
1993 | Modeling, Optimization and Control of Spatial Uniformity in Manufacturing Processes | RUEY-SHAN GUO ; E. Sachs | IEEE Transactions on Semiconductor Manufacturing | 33 | 26 | |
1989 | VLSI Process Control | RUEY-SHAN GUO ; K. Wong; A. Hu; S. Ha; E. Sachs | SRC Conference on Computer Integrated Manufacturing |