公開日期 | 標題 | 作者 | 來源出版物 | scopus | WOS | 全文 |
---|---|---|---|---|---|---|
2008 | The fabrication of silicon-based PZT microstructures using an aerosol deposition method | Chen, Bo Lin; Wang, Xuan-Yu; WEN-PIN SHIH ; Lee, Chi-Yuan; Sheu, Meei Ling; Hu, Yuh-Chung; Tsai, Keh Sung; Shih, Wen-Pin ; Lan, Kuo Cheng; Lee, Chih-Cheng; Guan, Siao Syun; Wu, Cheng Tien; Huang, Jung-Tang; Chen, Li Ping; Chang, Pei-Zen ; Hung, Kuan Yu; Huang, Jenq Wen; Chiang, Chih Kang; Liu, Shing Hwa; 蔡克嵩; 劉興華; 姜至剛; 洪冠予; 黃政文 | Journal of Micromechanics and Microengineering | 17 | 13 | |
2004 | Thermal effects in PZT: diffusion of titanium and recrystallization of platinum | Dai, Ching-Liang; Xiao, Fu-Yuan; Lee, Chi-Yuan; Cheng, Ying-Chou ; PEI-ZEN CHANG ; Chang, Shuo-Hung | Materials Science and Engineering A | 21 | 20 | |
2004 | 濕蝕刻晶片厚度即時監控之新穎方法 | 李其源; Lee, Chi-Yuan |