公開日期 | 標題 | 作者 | 來源出版物 | scopus | WOS | 全文 |
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2022 | Efficient and stable activation by microwave annealing of nanosheet silicon doped with phosphorus above its solubility limit | Tsai, CH; Savant, CP; Asadi, MJ; Lin, YM; Santos, I; Hsu, YH; Kowalski, J; Pelaz, L; Woon, WY; CHIH-KUNG LEE ; Hwang, JCM | APPLIED PHYSICS LETTERS | 2 | 2 | |
2022 | Rapid thermal process driven intra-die device variations | Tsai, CH; Aboy, M; Pelaz, L; Hsu, YH; Woon, WY; Timans, PJ; CHIH-KUNG LEE | MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING | 0 | 0 |