Issue Date | Title | Author(s) | Source | scopus | WOS | Fulltext/Archive link |
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2004 | A novel method for evaluating the thickness of silicon membrane using a micromachined acoustic wave sensor | Lee, C.-Y.; Cheng, Y.-C.; Wu, T.-T.; Chen, Y.-Y.; Chen, W.-J.; Pao, S.-Y.; Chang, P.-Z.; Chen, P.-H.; Yen, K.-H.; Xiao, F.-Y.; PING-HEI CHEN | Tamkang Journal of Science and Engineering |