公開日期 | 標題 | 作者 | 來源出版物 | scopus | WOS | 全文 |
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2011 | Local stress determination in Shallow Trench Insulator structures with one-side and two-sides Pad-SiN layer by polarized micro-Raman spectroscopy extraction and mechanical modelization | Liao, M.H. ; Chang, L.C. | 2011 International Semiconductor Device Research Symposium | 0 | 0 | |
1998 | Two-dimensional mapping of electric-field vector by electro-optic prober | Kuo, W.K.; Huang, S.L.; Horng, T.S.; Chang, L.C.; SHENG-LUNG HUANG | Optics Communications |