公開日期 | 標題 | 作者 | 來源出版物 | scopus | WOS | 全文 |
---|---|---|---|---|---|---|
2001 | The characteristic behavior of TMAH water solution for anisotropic etching on both silicon substrate and SiO 2 layer | Chen, P.-H.; Peng, H.-Y.; Hsieh, C.-M.; Chyu, M.K.; PING-HEI CHEN | Sensors and Actuators, A: Physical | |||
2001 | Ultra-deep LIGA process and its applications | Cheng, Y.; Shew, B.-Y.; Chyu, M.K.; Chen, P.H.; PING-HEI CHEN | Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment |