公開日期 | 標題 | 作者 | 來源出版物 | scopus | WOS | 全文 |
---|---|---|---|---|---|---|
2001 | Ultra-deep LIGA process and its applications | Cheng, Y.; Shew, B.-Y.; Chyu, M.K.; Chen, P.H.; PING-HEI CHEN | Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment |