2023 | Status and Performance of Integration Modules Toward Scaled CMOS with Transition Metal Dichalcogenide Channel | Chou, Ang Sheng; Hsu, Ching Hao; Lin, Yu Tung; Arutchelvan, Goutham; Chen, Edward; Hung, Terry Y.T.; Hsu, Chen Feng; Chou, Sui An; Lee, Tsung En; Madia, Oreste; Doornbos, Gerben; Su, Yuan Chun; Azizi, Amin; Sathaiya, D. Mahaveer; Cai, Jin; Wang, Jer Fu; Chung, Yun Yan; Wu, Wen Chia; Neilson, Katie; Yun, Wei Sheng; Hsu, Yu Wei; Hsu, Ming Chun; Hou, Fa Rong; Shen, Yun Yang; Chien, Chao Hsin; Wu, Chung Cheng; Wu, Jeff; Wong, H. S.Philip; Chang, Wen Hao; Van Dal, Mark; Cheng, Chao Ching; CHIH-I WU ; Radu, Iuliana P. | Technical Digest - International Electron Devices Meeting, IEDM | | | |