公開日期 | 標題 | 作者 | 來源出版物 | scopus | WOS | 全文 |
---|---|---|---|---|---|---|
2003 | Application of soft landing to the process control of chemical mechanical polishing | Chiu, Jian-Bin; Yu, Cheng-Ching; Shen, Shih-Haur | Microelectronic Engineering | |||
2003 | A pplication of soft landing to the process control of chemical mechanical polishing | Chiu, Jian-Bin; Yu, Cheng-Ching; Shen, Shih-Haur | Microelectronic Engineering 65(2003), 345–356 |