公開日期 | 標題 | 作者 | 來源出版物 | scopus | WOS | 全文 |
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2015 | Design of an electron-optical system with a ball-tip emission source through a numerical optimization method for high-throughput electron-beam–direct-write lithography | Hsuan-Ping Lee; Sheng-Yung Chen; Chun-Hung Liu; Ding-Qi; Yu-Tian Shen; KUEN-YU TSAI | Japanese Journal of Applied Physics | 0 | 0 |