公開日期 | 標題 | 作者 | 來源出版物 | scopus | WOS | 全文 |
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2003 | Deposition of Ru and RuO2 thin films employing dicarbonyl bis-diketonate ruthenium complexes as CVD source reagents | Lai, Ying-Hui; Chen, Yao-Lun; Chi, Yun; Liu, Chao-Shiuan; Carty, Arthur J.; SHIE-MING PENG ; Lee, Gene-Hsiang | Journal of Materials Chemistry |