公開日期 | 標題 | 作者 | 來源出版物 | scopus | WOS | 全文 |
---|---|---|---|---|---|---|
1999 | Modeling and optimization of wafer-level spatial uniformity with the use of rational subgrouping | Guo, Ruey-Shan; Chen, Argon; Liu, Cheewee; Lin, A.; Lan, M.; CHEE-WEE LIU | IEEE International Symposium on Semiconductor Manufacturing Conference |