公開日期 | 標題 | 作者 | 來源出版物 | scopus | WOS | 全文 |
---|---|---|---|---|---|---|
2015 | Efficient layout data compression algorithm and its low-complexity, high-performance hardware decoder implementation for multiple electron-beam direct-write systems | Chin-Khai Tang; Ming-Shing Su; Yi-Chang Lu; YI-CHANG LU | J. of Micro/Nanolithography, MEMS, and MOEMS | 3 | 3 | |
2013 | Electron Beam Exposure Apparatus, Electron Beam Generation Apparatus and Exposure Method (電子束曝光裝置、電子束產生裝置及曝光方法) | Yu-Hsuan Kuo; Ming-Shing Su; Yi-Chang Lu; Kuen-Yu Tsai; KUEN-YU TSAI |