公開日期 | 標題 | 作者 | 來源出版物 | scopus | WOS | 全文 |
---|---|---|---|---|---|---|
2005 | Novel Method for In-situ Monitoring of Thickness of Quartz during Wet Etching | Lee, C. Y.; Cheng, Y. C.; Wu, T. T.; Chen, Y. Y.; Chen, W. J.; Pao, S. Y.; Chang, P. Z.; Chen, Ping Hei | Japanese Journal of Applied Physics |