公開日期 | 標題 | 作者 | 來源出版物 | scopus | WOS | 全文 |
2003 | Application of soft landing to the process control of chemical mechanical polishing | Chiu, Jian-Bin; Yu, Cheng-Ching; Shen, Shih-Haur | Microelectronic Engineering | | | |
1999 | Autotune identification for systems with right-half-plane poles and zeros | Shen, Shih-Haur; Yu, Hong-Den; Yu, Cheng-Ching | Journal of Process Control | | | |
1996 | Autotune Identification under Load Disturbance | Shen, Shih-Haur; Wu, Jiun-Sheng; Yu, Cheng-Ching | Industrial & Engineering Chemistry Research | | | |
2005 | Batch Sequencing for Run-to-Run Control: Application to Chemical Mechanical Polishing | Chen, Yih-Hang; Su, An-Jhih; Shiu, Sheng-Jyh; Yu, Cheng-Ching; Shen, Shih-Haur | Industrial & Engineering Chemistry Research | | | |
1992 | Indirect feedforward control: multivariable systems | Shen, Shih-Haur; Yu, Cheng-Ching | Chemical Engineering Science | | | |
2004 | Multivariable control of multi-zone chemical mechanical polishing | Shiu, Sheng-Jyh; Yu, Cheng-Ching; Shen, Shih-Haur; Su, An-Jhih | Semiconductor Manufacturing Technology Workshop Proceedings | 0 | 0 | |
2003 | A pplication of soft landing to the process control of chemical
mechanical polishing | Chiu, Jian-Bin; Yu, Cheng-Ching; Shen, Shih-Haur | Microelectronic Engineering 65(2003), 345–356 | | | |
2003 | Robust operation of copper chemical mechanical polishing | Kao, Yi-Chung; Yu, Cheng-Ching; Shen, Shih-Haur | Microelectronic Engineering | | | |
1996 | Use of saturation-relay feedback for autotune identification | Shen, Shih-Haur; Yu, Hong-Den; Yu, Cheng-Ching | Chemical Engineering Science | | | |