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12001Interfacial microstructures of rf-sputtered TiNi shape memory alloy thin films on (100) siliconWu, S.K.; Chen, J.Z.; Wu, Y.J.; Wang, J.Y.; Yu, M.N.; Chen, F.R.; Kai, J.J.; SHYI-KAAN WU Philosophical Magazine A: Physics of Condensed Matter, Structure, Defects and Mechanical Properties 00