Publication
(All)

Results 1-1 of 1 (Search time: 0.006 seconds).

Issue DateTitleAuthor(s)SourcescopusWOSFulltext/Archive link
12013Direct-scatterometry-enabled optical-proximity-correction-model calibrationChih-Yu Chen; Philip C. W. Ng; Chun-Hung Liu; Yu-Tian Shen; Kuen-Yu Tsai; Jia-Han Li; Jason J. Shieh; Alek C. Chen; KUEN-YU TSAI Advanced Lithography 2013 - Metrology, Inspection, and Process Control for Microlithography XXVII 10