Publication
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Results 1-3 of 3 (Search time: 0.045 seconds).

Issue DateTitleAuthor(s)SourcescopusWOSFulltext/Archive link
11999Equipment Health Index and Real-time MonitoringRUEY-SHAN GUO; A. Chen; RUEY-SHAN GUO Automation Technology Conference 
21999Modeling, Optimization and Control of Wafer-level Spatial Uniformity for Rapid Thermal Oxidation of Silicon ProcessRUEY-SHAN GUO; M. Lan; A. Lin; A. Chen; RUEY-SHAN GUO Automation Technology Conference 
31999Network Ready Semiconductor Manufacturing Cluster ToolRUEY-SHAN GUO; A. Chen; C. Weng; S. Chang; P. Chang; C. Liu; C. Lu; S. Lee,; H. Huang; S. Lu; RUEY-SHAN GUO Automation Technology Conference