Results 1-3 of 3 (Search time: 0.027 seconds).

	Issue Date	Title	Author(s)	Source
1	1997	An Adaptive Process Controller for Semiconductor Manufacturing	RUEY-SHAN GUO; L. Huang; S. Wang; J. Chen; RUEY-SHAN GUO	Automatic Control Conference
2	1997	An Integrated Wafer Acceptance Test Scheme in Semiconductor Manufacturing	RUEY-SHAN GUO; C. Tsai; J. Fan,; S. Chang; RUEY-SHAN GUO	Automatic Control Conference
3	1997	Design and Implementation of an Active Furnace Monitoring System in Semiconductor Manufacturing	RUEY-SHAN GUO; S. Chang; C. Tseng; W. Mao; RUEY-SHAN GUO	Automatic Control Conference