因此本計畫的目標在量測近場光學下之待測物的動態資料，藉由結合創新干涉技術與掃描式近場光學顯微鏡(Near-field Scanning optical microscopy, NSOM)來建構創
Abstract: With the rapid development of nanotechnology, the number of scientific industries focused their research on nanotechnology are increasing rapidly. As nano-metrology is typically the pre-requisite for developing various nanotechnologies, it played an ever more important role in all nanotechnology research efforts. The near-field microscopy, for example, is a kind of imaging technology with spatial resolution unlimited by the traditional optical diffraction limit. Due to better understanding of the near-field optic theory and the improvement of fabrication techniques in recent years, the applications of near-field microscopy have became more popular. One advantage of near-field microscopy is that it can observe sub-wavelength features without any sample surface preparation process a priori. Besides, it will not disturb or damage the sample due to its non-contact nature. Recently, the diverse development of nanotechnology demands the research in this field focus not only on how to map topographic and optical properties with extremely high spatial resolution, but also on multi-point dynamic measurements. It is to be noted that maintaining nanometer resolution in these new developments is a must as well. In order to perform further research on nanotechnology, there is an imminent need for a metrology system that can perform both static and dynamic measurement with nano-scale resolution. Therefore, after reviewing all state-of-the-art near-field metrology systems, this proposal plans to develop a nano-metrology system that has dynamic measurement ability.
One objective of this proposal is to use the Near-field Scanning Optical Microscopy (NSOM) to understand how the nano-scale vibration of the sample will disturb the evanescent wave in the near-field regime. After developing the theory needed to understand this disturbance, we will combine this theory with the Photon Tunneling Microscopy (PTM) technique to develop a full-field, nano-scale, dynamic metrology system. Traditionally, the near-field microscopy only measures the intensity of light, and the interferometer only measure the phase information in the far-field range. However, this proposal plans to combine these two technologies to get both the phase and the amplitude information of the evanescent wave in the near-field regime. In order to achieve very high signal to noise ratio, we will study heterodyne interferometry, quadrature detection methods adopted in circular polarization interferometry and phase recovery method to get accurate phase information. Then we can calculate the displacement and velocity of the sample’s vibration. In addition, the direction ambiguity problem can be solved as well. In short, this proposal plans to initiate a three-year approach to develop the theory, design, and know-how on constructions needed to develop a metrology system prototype that can measure nano-scale vibration in the near-field regime.