主題:
aerosols; deposition; energy dispersive spectroscopy; energy harvesting; lead titanate; lead zirconate titanate; mems; niobium compounds; piezoelectricity; respiratory mechanics; scanning electron microscopy; thick films; aerosol deposition method; annealing temperatures; energy dispersive x ray spectroscopy; lead magnesium niobate; mechanical and electrical properties; piezoelectric property; piezoelectric voltage; stainless steel substrates; microelectromechanical devices