Project title
先進自動化光學檢測設備研發聯盟(1/3)
Internal ID
106-2622-8-002-006-TE3
Principal Investigator
Start Date
February 1, 2017
End Date
January 31, 2018
Partner Organizations
先進自動化光學檢測設備研發聯盟(1/3)
Keywords
自動化光學檢測(AOI)
半導體製程
線上檢測
精密量測
光學量測.
automated optical inspection (AOI)
semiconductor manufacturing processes
in-situ inspection
precision metrology
optical measurement.