晶圓檢測精密量測平台與關鍵光學量測探頭之研發(2/4)

Project title

Internal ID

105-2218-E-002-016-

Principal Investigator

Start Date

October 1, 2016

End Date

September 30, 2017

Partner Organizations

Keywords

精

密量

測

自動化光學檢測

晶圓檢測

光學量

測探頭

奈

米定位。

precision metrology

automated optical inspection (AOI)

wafer inspection

optical measuring probes

nano-scale positioning.