Skip to main content
English
中文
Log In
Log in
Log in with ORCID
NTU Single Sign On
Have you forgotten your password?
Home
.National Taiwan University / 國立臺灣大學
Project / 研究計畫
X-ray微影鄰近效應修正技術與高精度高深寬比元件製作應用
X-ray微影鄰近效應修正技術與高精度高深寬比元件製作應用
Details
Primary Data
Project title
X-ray微影鄰近效應修正技術與高精度高深寬比元件製作應用
Internal ID
108-2623-E-002-002-NU
Principal Investigator
KUEN-YU TSAI
Start Date
January 1, 2019
End Date
December 31, 2019
Organizations
Electrical Engineering
Partner Organizations
National Science and Technology Council