Project title
輕金屬以脈衝電漿沉積六甲基二矽胺(HMDSN)薄膜之研究
Internal ID
96-2622-E-002-022-CC3
Principal Investigator
Start Date
November 1, 2007
End Date
October 31, 2008
Partner Organizations
輕金屬以脈衝電漿沉積六甲基二矽胺(HMDSN)薄膜之研究
Keywords
輕金屬
PECVD 表面改質
HMDSN 鍍層
薄膜性能分析
最佳製程參數
Light metals
Surface modification of PECVD
HMDSN deposition
Thin film