Project title
矽光子元件
Internal ID
100-2221-E-002-158-MY3
Principal Investigator
Start Date
August 1, 2012
End Date
July 31, 2013
Partner Organizations
矽光子元件
Keywords
矽光子元件
矽波導
光電整合元件
積體光學
準分子雷射
反應式離子蝕刻
側壁粗糙度降低
Silicon photonics
silicon waveguide
optoelectronic integrated device
optical integrated circuit
excimer laser
reactive-ion etching
sidewall roughness reduction