2至1奈米製程世代全繞閘極式CMOS元件之次波長極紫外光微影成像度增進及非理想幾何元件建模技術

Project title

2至1奈米製程世代全繞閘極式CMOS元件之次波長極紫外光微影成像度增進及非理想幾何元件建模技術

Internal ID

111-2221-E-002-183-

Principal Investigator

Start Date

August 1, 2022

End Date

July 31, 2023

Organizations

Electrical Engineering

Partner Organizations

National Science and Technology Council