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.National Taiwan University / 國立臺灣大學
Project / 研究計畫
超薄鋯-鋁-銅-鎳金屬玻璃膜作為銅金屬層與矽基材間之擴散阻障
超薄鋯-鋁-銅-鎳金屬玻璃膜作為銅金屬層與矽基材間之擴散阻障
Details
Primary Data
Project title
超薄鋯-鋁-銅-鎳金屬玻璃膜作為銅金屬層與矽基材間之擴散阻障
Internal ID
100-2221-E-002-129-MY2
Principal Investigator
CHUN-HWAY HSUEH
Start Date
August 1, 2012
End Date
July 31, 2013
Partner Organizations
National Science and Technology Council