可供四吋到八吋及破作晶圓鍵結之快熱製程機台

Project title

可供四吋到八吋及破作晶圓鍵結之快熱製程機台

Internal ID

NSC91-AT-7-002-001

Principal Investigator

Start Date

October 1, 2002

End Date

December 31, 2003

Partner Organizations

National Science and Technology Council