先進大氣電漿輔助化學氣相鍍膜系統的研發-子計畫四：噴射式大氣電漿鍍製大面積氧化鋅薄膜之阻值均勻度分析與改善

Project title

先進大氣電漿輔助化學氣相鍍膜系統的研發-子計畫四：噴射式大氣電漿鍍製大面積氧化鋅薄膜之阻值均勻度分析與改善

Internal ID

104-2221-E-002-024-MY2

Principal Investigator

Start Date

August 1, 2016

End Date

July 31, 2017

Partner Organizations

National Science and Technology Council