Skip to main content
English
中文
Log In
Log in
Log in with ORCID
NTU Single Sign On
Have you forgotten your password?
Home
.National Taiwan University / 國立臺灣大學
Project / 研究計畫
開發能提升半導體蝕刻之電漿石英管壽命的技術(II)
開發能提升半導體蝕刻之電漿石英管壽命的技術(II)
Details
Primary Data
Project title
開發能提升半導體蝕刻之電漿石英管壽命的技術(II)
Internal ID
111-2622-E-002-022-
Principal Investigator
JIA-HAN LI
Start Date
June 1, 2022
End Date
May 31, 2023
Organizations
Engineering Science and Ocean Engineering
Partner Organizations
National Science and Technology Council