適用32奈米以下製程之高產能、低成本平行寫入無光罩微影技術初步研究

Project title

適用32奈米以下製程之高產能、低成本平行寫入無光罩微影技術初步研究

Internal ID

95-2218-E-002-045-

Principal Investigator

Start Date

February 1, 2006

End Date

July 31, 2006

Partner Organizations

National Science and Technology Council