Project title
基於LCoS之全域彩色共焦三維形貌顯微量測系統與關鍵技術研發(2/2)
Internal ID
109-2622-E-002-006-CC2(企業培育專案-科技部追加款)
Principal Investigator
Start Date
July 1, 2020
End Date
May 31, 2021
Partner Organizations
基於LCoS之全域彩色共焦三維形貌顯微量測系統與關鍵技術研發(2/2)
Keywords
液晶覆矽
彩色共焦顯微術
表面形貌量測術
全域式量測
自動化光學檢測
LCoS (Liquid crystal on silicon)
Chromatic confocal microscopy
Surface profilometry
Full-field measurement
AOI (Automated optical inspection)