超薄絕緣層新穎製程開發及其在矽金氧半元件之應用

Project title

超薄絕緣層新穎製程開發及其在矽金氧半元件之應用

Internal ID

96-2628-E-002-246-MY3

Principal Investigator

Start Date

August 1, 2009

End Date

July 31, 2010

Partner Organizations

National Science and Technology Council