半間距22奈米以下技術節點前瞻非化學放大式分子光阻之鄰近效應建模與運用

Project title

半間距22奈米以下技術節點前瞻非化學放大式分子光阻之鄰近效應建模與運用

Internal ID

104-2923-E-002-007-MY3

Principal Investigator

Start Date

August 1, 2017

End Date

July 31, 2018

Partner Organizations

National Science and Technology Council