使用遠程電漿輔助式原子層沉積技術在矽基板上成長氮化鎵異質磊晶所需之高品質緩衝層(2/2)

Project title

使用遠程電漿輔助式原子層沉積技術在矽基板上成長氮化鎵異質磊晶所需之高品質緩衝層(2/2)

Internal ID

106-2622-E-002-006-CC2

Principal Investigator

Start Date

February 1, 2017

End Date

January 31, 2018

Partner Organizations

National Science and Technology Council